Enhanced VLSI Microlithography Research at Rice
University
Welcome to the Enhanced VLSI Microlithography Research Group at Rice
University.
The focus of the Enhanced VLSI Microlithography project has been two-fold;
first, enhanced Computer-aided-design tools for optical proximity correction,
and second, novel imaging systems for enhanced resolution of critical features
in a VLSI design. This page presents the CAD research on the integration of
technology CAD tools with electronic design CAD tools. See also the Rice Laser Science Group for
additional information on current work on novel imaging and sensor systems.
